Resolution Improvement in Stage-Scanning Electron Holography: Comparison with Conventional Electron Holography

摘要

Electron holography provides information on the phase and amplitude of electron wave passing through a specimen. The recently proposed stage-scanning electron holography technique should improve the spatial resolution of phase and amplitude images compared to the conventional electron holography based on the Fourier transformation method. To demonstrate the resolution improvement, cobalt nanoparticles were observed using the stage-scanning holography and the conventional holography, and significantly sharper images were obtained with the former technique.