首页> 外文期刊>International Journal of Electrochemical Science >Effect of Thickness on Boron-Doped Silicon Thin Film Deposited onto Silver-Aluminium Back Contact-Coated Plastic Substrate by Screen Printing
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Effect of Thickness on Boron-Doped Silicon Thin Film Deposited onto Silver-Aluminium Back Contact-Coated Plastic Substrate by Screen Printing

机译:厚度对丝网印刷沉积在银铝背接触涂层塑料基板上的掺硼硅薄膜的影响

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This paper investigates the effect of thickness on the properties of p-type polycrystalline Si thin filmdeposited onto silver-aluminium back contact-coated polyethylene terephthalate (PET) substrate. In thefabrication, the substrate was coated using screen printing technology, and boric acid (0.1 g/l) wasused as the boron-doping source. Three different weights of boron-doped Si powder were dissolved in40 ml polyethylene glycol to create Si pastes with different viscosities. These pastes were used to printthree different thicknesses of p-type Si thin film on Ag-Al alloy-coated PET substrates. Differenttechniques were employed to analyze the effects of varying thicknesses on the properties of Si thinlayers. X-ray diffraction (XRD) was used to determine the crystallite size (D) and stress in the Si thinfilm. Surface morphology and roughness were studied by scanning electron microscopy (SEM) andatomic force microscopy (AFM). The thin film component elements were detected using EDXattached to an SEM system. The carrier concentration, Hall mobility, and other electrical propertieswere determined through Hall Effect measurements. The optical band gap was determined from theUV-visible absorbance spectrum, and the results indicate that band gap energy is proportional to thethickness of the Si layer.
机译:本文研究了厚度对沉积在银铝背面接触涂覆的聚对苯二甲酸乙二醇酯(PET)衬底上的p型多晶硅薄膜的性能的影响。在制造过程中,使用丝网印刷技术对基板进行涂层,然后使用硼酸(0.1 g / l)作为硼掺杂源。将三种不同重量的掺硼硅粉溶解在40毫升聚乙二醇中,制成具有不同粘度的硅浆。这些浆料用于在涂有Ag-Al合金的PET基板上印刷三种不同厚度的p型Si薄膜。采用不同的技术来分析不同厚度对Si薄膜性能的影响。 X射线衍射(XRD)用于确定Si薄膜的微晶尺寸(D)和应力。通过扫描电子显微镜(SEM)和原子力显微镜(AFM)研究了表面形态和粗糙度。使用附接到SEM系统的EDX检测薄膜成分元素。通过霍尔效应测量来确定载流子浓度,霍尔迁移率和其他电性能。由UV-可见吸收光谱确定光学带隙,结果表明带隙能量与Si层的厚度成比例。

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