Study of y-rays Enhanced Changes of the ZnO:Al Thin Film Structure and Optical Properties

摘要

In this work thin film samples of 300 nm thickness with composition ZnAlO were deposited on glasssubstrate by DC sputtering technique. The effect of the atmosphere gas contents during sputtering wasstudied by using Ar for some of the prepared samples and Ar+O2 mixture for the others. Additionalinvestigations were also done for the effect of the heat treatment of the samples for comparison with60 gamma irradiation. The samples were irradiated by three gradual gamma rays doses using Co source.The x-ray diffraction patterns showed that the deposited films were of amorphous structure andconverted partially to crystalline form by irradiation. Optical properties of the investigated sampleswere measured using UV-vis spectrometer. The transmission spectra of irradiated samples werecompared with that of unirradiated ones for comparison. In general, it was found that the opticalparameters of the samples showed decrease in the transmittance after irradiation and the calculatedoptical energy gap was decreased. On the other hand, the heat treatment of the samples increased theenergy gap. The data were analyzed and discussed in the light of gamma rays interaction with theinvestigated thin films.