Effect of the Anodization Parameters on the Volume Expansion of Anodized Aluminum Films

摘要

The effect of anodization parameters, e.g. anodizing voltage, anodizing current, duration time,electrolyte temperature, electrolyte type and concentration, on the volume expansion of anodized Al,Al-1wt%Si and Al-1%Cu thin films have been studied. The volume expansion factor of anodic porousalumina is found to vary from 1.32 to 2.08, depending on the anodizing voltage, anodizing currentdensity and electrolyte type. The electrolyte temperature and impurity type have slight effect on thevolume expansion factor. The relation between the pore density of porous alumina and the anodizing10 (-0.042V) voltage is found to follow the relation NP=9.410 exp . In addition, the current efficiencyduring the anodization was determined to be about 83%.