Síntesis de películas delgadas de TiO2 por el método SILAR y estudio de la influencia del recocido en las propiedades estructurales, morfológicas y ópticas

摘要

PreparationandcharacterizationofTiOsub2/subfilmsweremade.FilmsweresynthesizedonglasssubstratesbytheSILAR(SuccessiveIonicLayerAdsorptionandReaction)method.Thepreparationconsistedof150cyclesofasuccessiveandalternateimmersionofsubstratesintheprecursorsolutionandindistilledwaterat353K.GrowingwasconductedattwoconditionsoftheprecursorsolutionwhichcontainedTiClsub3/subandNHsub2/subCONHsub2/sub:atroomtemperatureandat343K.Afterthegrowth,filmswereannealedat723Kfor2hours.Regardingcharacterization,sampleswerestudiedusingXRD,SEMandUV#45;Vis.Structuralcharacterizationresultsshowedthat,ingeneral,thefilmspresentedanamorphouscrystallinestructureexceptthosewhichweregrownwithprecursorsolutionat343Kandthermallytreatedafterthegrowths,whichpresentedananatasecrystallinestructure.Concerningtheirmorphology,agranularstructureandarandomdistributionofaflower#45;likestructurewereobserved.Grainsizesdidnotchangesignificantlyafterannealing.Theopticalstudywascarriedouttakingintoaccountanindirecttransitionalloweddeterminingthebandgapenergytobearound3.1eV.Thisvalue,whichistypicalforTiOsub2/sub,decreasesafterannealing,usualforthistypeoffilms./font