Sensorial properties of ferroelectric-semiconductor (Bax Sr1-xTiO3 – p-Si) heterojunction

摘要

p-Si/BaxSr1-xTiO3 heterojunction sensorial properties in electrolyte solution are investigated. It is stated that the structure's capacitance and current exhibit certain sensitivity to pH of electrolyte medium. Based on experimental results we conclude that proposed heterojunction structures can be used as combined multifunctional sensor, where ferro-nanofilm can “work” in two directions: horizontal – as a gas, humidity and ion sensitive membrane and in vertical direction (with Si substrate) - as an ampereometric sensor and potentiometric field effect capacitance sensor.