The bismuth oxides thin films have been prepared by thermal oxidation (in air) of vacuum evaporated vapour chopped and nonchopped bismuth films. Polycrystalline and polymorphic structure of bismuth oxide have been observed. The improved adhesion and decreased intrinsic stress of bismuth oxide thin films due to vapour chopping is reported. The effect of oxidation time, oxidation temperature and film thickness on the adhesion and intrinsic stress is studied. The response of these films to ambient air exposure for 40 days is also reported. Both the vapour chopped and nonchopped films showed decrease in adhesion and increase in intrinsic stress upon exposure to air. The effect of air ageing on the vapour chopped films was found lesser.
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