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A Birefringent-Refraction Transducer for Measuring Angular Displacement Based on Heterodyne Interferometry

机译:基于外差干涉法的角位移双折射传感器

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摘要

In this paper, an optical angle sensor with a birefringent transducer for measuring angular displacement based on a heterodyne interferometry is proposed. The achievable repeatability and linearity provide sufficient evidence for the practical use. As a result, a resolution of 5.8 × 10 ?6 with a dynamic range of 5° has been achieved by utilizing a KTP (potassium titanyl phosphate) plate immersed in a high refractive index oil with refractive index of 1.7.
机译:在本文中,提出了一种具有双折射传感器的光学角度传感器,用于基于外差干涉测量法测量角位移。可达到的重复性和线性度为实际使用提供了足够的证据。结果,通过使用浸没在折射率为1.7的高折射率油中的KTP(钛氧钛酸钾)板,实现了在5°的动态范围内的5.8×10 6的分辨率。

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