In the present work the structural-parametric model of the piezoactuator is determined in contrast electrical equivalent circuit types Cady or Mason for the calculation of the piezoelectric transmitter and receiver, the vibration piezoactuator and the vibration piezomotor with the mechanical parameters in form the velosity and the pressure. The aim of this work is to obtain the structural-parametric model of the electroelastic actuator with the mechanical parameters the displacement and the force. The method of mathematical physics is used. Structural scheme of electroelastic actuator for nanotechnology is obtained. The transfer functions of the actuators are determined. For calculations control systems for nanotechnology with piezoactuator the structural scheme and the transfer functions of piezoactuator are obtained. The generalized structural-parametric model, the generalized structural scheme, the generalized matrix equation for the electroelastic actuator nano- and microdisplacement are obtained in the matrix form. The deformations of the electroelastic actuator for the precision mechanics are described by the matrix equation.
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