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Improving Barrier Properties of PET by Depositing a Layer of DLC Films on Surface

机译:通过在表面沉积一层DLC膜来改善PET的阻隔性能

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The diamond-like carbon films (DLC films) depositing on the Poly (ethylene terephthalate) (PET) surface are obtained by plasma-enhanced chemical vapor deposition (PECVD), and the working gases are acetylene and argon gas. Surface morphology and the internal structure of DLC films are investigated by using Raman and FESEM, and the barrier properties of PET films which have been deposited the DLC films are tested in this paper. The results show that the deposition process parameters have an important effect on structure and performance of DLC films. It is shown that the diamond-like carbon films prepared by PECVD system are an amorphous carbon films which mixed withsp3bond andsp2bond. The best oxygen barrier property and water vapor barrier property of PET films are increased by 11 times and 12 times, respectively, in which theID/IGratio of the DLC film is nearly 0.76, and thesp3content is about 40%.
机译:通过等离子体增强化学气相沉积(PECVD)获得沉积在聚对苯二甲酸乙二醇酯(PET)表面上的类金刚石碳膜(DLC膜),并且工作气体为乙炔和氩气。用拉曼光谱和FESEM研究了DLC薄膜的表面形貌和内部结构,并测试了沉积在DLC薄膜上的PET薄膜的阻隔性能。结果表明,沉积工艺参数对DLC薄膜的结构和性能具有重要影响。结果表明,采用PECVD法制得的类金刚石碳膜为无定形碳膜,混合有sp3键和sp2键。 PET薄膜的最佳氧气阻隔性和水蒸气阻隔性分别提高了11倍和12倍,其中DLC薄膜的ID / IG比接近0.76,sp3含量约为40%。

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