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Improving Barrier Properties of PET by Depositing a Layer of DLC Films on Surface

机译:通过在表面上沉积一层DLC薄膜来改善PET的阻隔性能

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摘要

The diamond-like carbon films (DLC films) depositing on the Poly (ethylene terephthalate) (PET) surface are obtained by plasma-enhanced chemical vapor deposition (PECVD), and the working gases are acetylene and argon gas. Surface morphology and the internal structure of DLC films are investigated by using Raman and FESEM, and the barrier properties of PET films which have been deposited the DLC films are tested in this paper. The results show that the deposition process parameters have an important effect on structure and performance of DLC films. It is shown that the diamond-like carbon films prepared by PECVD system are an amorphous carbon films which mixed with sp3 bond and sp2 bond. The best oxygen barrier property and water vapor barrier property of PET films are increased by 11 times and 12 times, respectively, in which the ID/IG ratio of the DLC film is nearly 0.76, and the sp3 content is about 40%.
机译:沉积在聚(亚乙二醇酯)(PET)表面上的金刚石碳膜(DLC膜)通过等离子体增强的化学气相沉积(PECVD)获得,并且工作气体是乙炔和氩气。通过使用拉曼和FeSem研究了DLC膜的表面形态和内部结构,并在本文中测试了已经沉积DLC膜的PET膜的阻隔性能。结果表明,沉积工艺参数对DLC膜的结构和性能具有重要作用。结果表明,通过PECVD系统制备的金刚石状碳膜是与SP3键合和SP2键合的无定形碳膜。 PET薄膜的最佳氧气阻隔性和水蒸气屏障性分别增加了11倍和12倍,其中DLC膜的ID / IG比率接近0.76,SP3含量约为40%。

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