Mechanical Poperties of TiN/NbN Multilayered Films Prepared by PVD Coating

摘要

The TiN/NbN multilayered thin films using D.C. magnetron sputtering techniques have been studied. These are multilayer coatings with up to 8-64 layers, composing generally of arrangements of two materials of TiN and NbN. XRD analysis shows the TiN/NbN multilayered thin films of novel composite materials are constituted of crystalline structure and strong preferred orientation. Proper material selection and the adjustment of number of the layers can be contributed to an exceptionally enhancing of the mechanical properties and hardness values. On mechanical properties, Young’s modulus and hardness values were enhanced progressively for layers number increase. The TiN/NbN multilayer films with alternating layers at 64 layers films exhibit the highest nano-hardness and best Young’s modulus. It shows lowest friction coefficient and excellent wear resistance against steel ball.