Deposition of DLC Film on Stainless Steel Substrates Coated by Nickel Using PECVD Method

Zahra Khalaj; Mahmood Ghoranneviss; Elnaz Vaghri; Amir Saghaleini; Mircea V. Diudea

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Deposition of DLC Film on Stainless Steel Substrates Coated by Nickel Using PECVD Method

机译：PECVD法在镀镍不锈钢基材上沉积DLC膜

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Research on diamond-like carbon (DLC) films has been devoted to find both optimized conditions and characteristics of the deposited films on various substrates. In the present work, we investigate the quality of the DLC films grown on stainless steel subs

机译：已经对类金刚石碳（DLC）膜进行了研究，以发现各种衬底上沉积膜的最佳条件和特性。在目前的工作中，我们调查了在不锈钢潜水艇上生长的DLC膜的质量

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《Acta Chimica Slovenica》 |2012年第2期|共6页
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Zahra Khalaj; Mahmood Ghoranneviss; Elnaz Vaghri; Amir Saghaleini; Mircea V. Diudea;
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中图分类化学;
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1. Deposition of DLC Film on Stainless Steel Substrates Coated by Nickel Using PECVD Method [J] . Zahra Khalaj, Mahmood Ghoranneviss, Elnaz Vaghri Acta Chimica Slovenica . 2012,第2期

机译：PECVD法在镀镍不锈钢基材上沉积DLC膜
2. Effect of the substrate bias on the Raman spectra and thermal stability of diamond-like carbon (DLC) and silicon-modified DLC films prepared by plasma-enhanced chemical vapour deposition (PECVD) [J] . Ogwu A.A., Maguire P.D., McLaughlin J.A., Journal of Physics, D. Applied Physics: A Europhysics Journal . 1999,第9期

机译：衬底偏压对通过等离子体增强化学气相沉积（PECVD）制备的类金刚石碳（DLC）和硅改性DLC膜的拉曼光谱和热稳定性的影响
3. Characteristics of Carbide Interfacial Layer Formed During Deposition of DLC Films on 316L Stainless Steel Substrate [J] . M. Dudek Archives of Metallurgy and Materials . 2017,第4期

机译：在316L不锈钢基底上沉积DLC膜期间形成的碳化物界面层的特征
4. Study on Deposition of Amorphous hydrogenate DLC Films on Germanium Substrates by RF-PECVD [C] . Ji-long Tang, Guo-jun Liu, Jing Wang, International symposium on advanced optical manufacturing and testing technologies;AOMATT08 . 2009

机译：RF-PECVD在锗衬底上沉积非晶态氢化DLC膜的研究
5. Control and design of critical properties of PECVD carbon doped low-k silica thin films by deposition methods and film thickness. [D] . Zhou, Hong. 2002

机译：通过沉积方法和膜厚控制和设计PECVD碳掺杂低k二氧化硅薄膜的关键性能。
6. Deposition of Stainless Steel Thin Films: An Electron Beam Physical Vapour Deposition Approach [O] . Naser Ali, Joao A. Teixeira, Abdulmajid Addali, 2019

机译：不锈钢薄膜的沉积：电子束物理气相沉积方法
7. Fretting Wear of DLC Film Coated on SUS304 Stainless Steel - The Wear Property in Seawater and Its Improvement [O] . Masayuki Shima, Tonglin Huang, Yasuhiro Konda, 2014

机译：SUS304不锈钢上涂层DLC薄膜的微动磨损 - 海水中的磨损性能及其改进

Deposition of DLC Film on Stainless Steel Substrates Coated by Nickel Using PECVD Method

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