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首页> 外文期刊>Bulletin of materials science >Swift heavy ion irradiation induced modification of structure and surface morphology of BiFeO3 thin film
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Swift heavy ion irradiation induced modification of structure and surface morphology of BiFeO3 thin film

机译:快速重离子辐照诱导BiFeO3薄膜结构和表面形态的改性

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BiFeO3 (BFO) thin films of thickness about 800 nm deposited on Si (100) substrates by sola€“gel spin coating method were irradiated by 200 MeV Ag ions. Modification of structure and surface morphology of the films under irradiation was studied using glancing incidence X-ray diffraction (GIXRD) and atomic force microscope (AFM). Fluence dependence of GIXRD peak intensity indicated formation of 10 nm diameter cylindrical amorphous columns in crystalline BFO due to 200 MeV Ag ion irradiation. AFM analysis indicated that the pristine film consists of agglomerated grains with diffuse grain boundary. Irradiation led to reduced agglomeration of the grains with the formation of sharper grain boundaries. The rms roughness (e???rms) estimated from AFM analysis increased from 6.2 in pristine film to 12.7 nm when the film irradiated at a fluence of 1 ?— 1011 ions cm-2. Further irradiation led to decrease of e???rms which finally saturated at a value of 7a€“8 nm at high ion fluences. The power spectral density analysis indicated that the evolution of surface morphology of the pristine film is governed by the combined effect of evaporation condensation and volume diffusion processes. Swift heavy ion irradiation seems to increase the dominance of volume diffusion in controlling surface morphology of the film at high ion fluences.
机译:通过溶胶凝胶旋涂法在Si(100)衬底上沉积厚度约800 nm的BiFeO 3 (BFO)薄膜,并用200 MeV Ag离子辐照。使用掠入射X射线衍射(GIXRD)和原子力显微镜(AFM)研究了辐照下膜的结构和表面形态的改性。 GIXRD峰强度的注量依赖性表明,由于200 MeV Ag离子辐照,在结晶BFO中形成了直径为10 nm的圆柱形无定形柱。原子力显微镜分析表明,原始膜由具有弥散晶界的团聚颗粒组成。辐照导致晶粒的聚集减少,形成更清晰的晶界。根据AFM分析估计的均方根粗糙度(e ??? rms )从原始薄膜中的6.2增加到以1?— 10 11 的通量辐照时的12.7 nm。离子cm -2 。进一步的辐照导致e rms 的降低,最终在高离子通量下,其饱和度达到7a-8nm。功率谱密度分析表明,原始膜表面形貌的演化受蒸发冷凝和体积扩散过程共同作用的支配。快速重离子辐照似乎在控制高离子通量的薄膜表面形态中增加了体积扩散的优势。

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