Multiobjective scheduling for semiconductor manufacturing plants

摘要

Scheduling of semiconductor wafer manufacturing system is identified as a complex problem, involving multiple and conflicting objectives (minimization of facility average utilization, minimization of waiting time and storage, for instance) to simultaneously satisfy. In this study, we propose an efficient approach based on an artificial neural network technique embedded into a multiobjective genetic algorithm for multi-decision scheduling problems in a semiconductor wafer fabrication environment.