Identification of an equivalent model for the permanent magnets of a magnetron sputtering device

摘要

Purpose - The aim of the work was to obtain an auxiliary instrument able to give the magnetic configuration of a magnetron sputtering device for operation with targets, magnetic and non magnetic, with different heights, starting from a device with no detailed information of the source. Design/methodology/approach - An inverse problem has been dealt with. A 2D numerical analysis has been performed, which utilizes as a starting point a model identified with a simple analytical procedure based on measurements. Findings - A satisfactory equivalent model has been identified, and validated in several different conditions. Originality/value - The proposed approach can be applied when no detailed information of the source is available, in the case of a cathode without a ferromagnetic yoke.