Application of dc magnetron sputtering system to the multilayer mirror in the extreme ultraviolet region

摘要

Helium in the plasmasphere resonantly scatters the extreme ultraviolet lights (EUV) from the sun. Imaging of the plasmasphere can be done by taking pictures using these resonance scatter- ing lines HeII (30.4nm) and HeI (58.4nm). This imaging is. However, challenging because most common optical coatings don't have reflectivity for EUV wavelength range.