Wafer measurement technology reduces contamination risks

摘要

CyberOptics Semiconductor (www.cyberoptics.com) has introduced WaferSense ALS technology, designed to provide real-time measurement data to fab managers and engineers without having to shut down process equipment to take measurements. The ALS (Auto Leveling Sensor) wafer-like device can move through process equipment and transmit information wirelessly to ensure that all stations are level and coplanar. It can be placed in cassettes, FOUPs, on end effectors, aligners, in load locks and in process chambers. CyberOptics says its technology is designed to provide precise pitch and roll measurements that can be logged to relate coplanarity with yield, and to determine the tool adjustments needed for best yields.