WORLD'S FIRST SEMICON WAFER FAB TO USE SWIRLING INDUCTION HVAC SYSTEM

摘要

Mie Fujitsu Semiconductor of Japan has added a new production line based on advanced, environmentally-friendly technologies to its Mie plant in Kuwana. The cleanroom is equipped throughout with a Swirling Induction Type HVAC System (SWIT) from Takasago Thermal Engineering, which will have a smaller environmental footprint than conventional systems while ensuring high-quality manufacturing. This is the world's first use of this technology in wafer fabrication cleanrooms for semiconductors.