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High aspect ratio 'multiple wire' microvias in flexible PCBs

机译:柔性PCB中的高纵横比“多线”微孔

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Purpose - The purpose of this paper is to present an update and the latest results from work on high aspect ratio "multiple wire" microvias in porousrnflexible Kapton foils for printed circuit boards (PCBs).rnDesign/methodology/approach - Kapton foils are made porous by ion track technology and dry resist patterning. In combination with thin filmrndeposition and electroplating the technology is used to define circuits and sensors with microvias made of many individual high aspect ratio wires. Thernprocesses are within the reach of many production environments and are suitable for flexible PCB fabrication.rnFindings - The use of these novel processes enables new types of microvias and multiple wire structures in the foils for millimeter wave circuitry ofrnsubstrate integrated waveguides and shielding, as well as for sensors with high thermal resistance.rnResearch limitations/implications - Today, through foil electroplating is fairly slow and more work should be made with copper electroplating. Ionrntrack technology works well on polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyimide (PI) but should also be studied forrnnovel polymer foils such as liquid crystal polymers (LCPs).rnOriginality/value - The paper details how ion track and PCB technology can be combined to enable a new type of through the foil via interconnectrnthat consists of a multitude of wires. With these porous substrates, double-sided circuits with high aspect ratio microvias and other multiple wirernstructures can be created using only lithography, thin film deposition, and electroplating. A new type of electrothermal sensorfoil is presented withrnseveral advantages over its competing micro electro mechanical systems (MEMS) based Si sensors.
机译:目的-本文的目的是提供有关印刷电路板(PCB)的多孔柔性Kapton箔中高纵横比“多线”微孔工作的更新和最新结果。设计/方法/方法-使Kapton箔多孔通过离子跟踪技术和干法抗蚀剂构图。结合薄膜沉积和电镀技术,该技术用于定义具有由许多单独的高纵横比导线制成的微孔的电路和传感器。该工艺在许多生产环境中都可以使用,并且适合于灵活的PCB制造。rn发现-使用这些新颖的工艺可以在箔中使用新型微孔和多线结构,以用于集成基板的波导和屏蔽的毫米波电路,以及研究限制/意义-如今,通过箔片电镀的速度相当慢,应该使用铜电镀进行更多的工作。 Ionrntrack技术在聚对苯二甲酸乙二醇酯(PET),聚萘二甲酸乙二醇酯(PEN)和聚酰亚胺(PI)上效果很好,但是对于诸如液晶聚合物(LCPs)之类的新型聚合物箔也应进行研究。可以将PCB技术组合起来,以实现一种由多种导线组成的新型通孔互连。使用这些多孔基板,仅使用光刻,薄膜沉积和电镀即可创建具有高长宽比的微孔和其他多种导线结构的双面电路。提出了一种新型的电热传感器箔,它比基于竞争的微机电系统(MEMS)的硅传感器具有许多优势。

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