Fabrication and application of near- field optical fibre probe

摘要

In this paper, the fabrication of a large cone angle near-field optical fibre probe, suing the two-step chemical etching method and bent probe, is introduced, and the controlling parameters of he coated Cr-Al film at the probe tip are presented. The scanning electron microscopy images display that the tip diameter of the uncoated large cone angle fibre probe obtained is less than 50nm, the cone angle over 90°, and the diameter of light aperture at the coated probe tip is less than 100 nm.