Study on the Phase Detecting Laser Interferometric System with Computer Generated Hologram

摘要

A Phase detecting interferometric system with computer generated hologram (CGH) recently built is described. Its optical system and CGH interference field are discussed. Based upon the phase detecting technique and fitting processing method of digital wavefront, the system can realize measurement with high accuracy. The experimental results show that a precision of λ/20 can be obtained in measuring aspheric surface.