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首页> 外文期刊>Chemical Vapor Deposition >Deposition of Large-Area and Protective Diamond-like Carbon Coatings on Glass Substrates by Low-Pressure Dielectric Barrier Discharges†
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Deposition of Large-Area and Protective Diamond-like Carbon Coatings on Glass Substrates by Low-Pressure Dielectric Barrier Discharges†

机译:低压介电势垒放电在玻璃基板上沉积大面积的保护性类金刚石碳涂层†

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摘要

Large-area (370mm×500mm) diamondlike carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.
机译:通过低压介电势垒放电将大面积(370mm×500mm)类金刚石碳(DLC)膜沉积在玻璃基板上。沉积的DLC膜坚硬,均匀且极其光滑。沉积在大面积玻璃上的DLC膜可以潜在地用作抗划伤和腐蚀阻挡层。

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