Deposition of large-area and protective diamond-like carbon coatings on glass substrates by low-pressure dielectric barrier discharges

摘要

Large-area (370mm×500mm) diamondlike carbon (DLC) films were deposited on the glass substrate by low-pressure dielectric barrier discharges. The deposited DLC films were hard, homogeneous and extremely smooth. The DLC film deposited on the large-area glass can be potentially used as a scratch resistant and corrosion barrier layer.