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Corrosion, wear, and friction behavior of a number of multilayer two-, three- and multicomponent nitride coatings on different substrates, depending on the phase and elemental composition gradient

机译:取决于相和元素组成梯度,不同基材上的多层多层二,三和多组分氮化物涂层的腐蚀,磨损和摩擦行为

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In this paper, single-layer coatings based on two-component TiN and ZrN, three-component (Ti, Zr)N and (Ti, Al)N and four-component (Ti, Zr, Al)N nitrides were obtained by pulsed magnetron sputtering, DC magnetron sputtering, cathodic arc evaporation, and com-bined method at various process parameters. The protective properties of these coatings in 0.3% NaCl, 3% NaCl, and 5% NaOH were related with their structure, texture, thickness, phase and elemental composition. The two-component nanostructured coating TiN based on phase c-TiN obtained by pulsed magnetron sputtering decreases the corrosion and passive current in 3% NaCl by over 2500 times. The stoichiometric nanostructured coating ZrN deposited by cathodic arc evaporation slows down the corrosion in the 5% NaOH by over 3000 times, and the passive current - by 2000 times. The single-layer three-component (Ti, Al)N and four-component (Ti, Zr, Al)N coatings exhibit, as a rule, worse corrosion resistance compared to the two-component TiN, ZrN and three-component (Ti, Zr)N coatings. It was found that the composition gradient inside the single-layer coating leads to a deterioration of its protective properties. Based on alternating TiN, ZrN, and (Ti, Zr)N layers optimized by structure and composition five multilayer coatings have been developed. The structure and composition gradient of multilayer coatings was received by changing of material and deposition method of layers. It has been experimentally proved that the obtained multilayer nanostructured coatings possess a complex of high corrosion, physicomechanical and tribological properties.
机译:本文通过脉冲法获得了基于二组分TiN和ZrN,三组分(Ti,Zr)N和(Ti,Al)N以及四组分(Ti,Zr,Al)N氮化物的单层涂层磁控溅射,直流磁控溅射,阴极电弧蒸发以及各种工艺参数下的组合方法。这些涂层在0.3%NaCl,3%NaCl和5%NaOH中的防护性能与其结构,质地,厚度,相和元素组成有关。通过脉冲磁控溅射获得的基于c-TiN相的两组分纳米结构涂层TiN可以将3%NaCl中的腐蚀和无源电流降低2500倍以上。通过阴极电弧蒸发沉积的化学计量的纳米结构涂层ZrN使5%NaOH中的腐蚀减慢了3000倍以上,使无源电流减慢了2000倍。通常,单层三组分(Ti,Al)N和四组分(Ti,Zr,Al)N涂层与两组分TiN,ZrN和三组分(Ti ,Zr)N涂层。发现单层涂层内部的组成梯度导致其保护性能的劣化。基于通过结构和成分优化的交替TiN,ZrN和(Ti,Zr)N层,已开发出五种多层涂层。通过改变层的材料和沉积方法得到多层涂层的结构和组成梯度。实验证明,所获得的多层纳米结构涂层具有高腐蚀,物理力学和摩擦学性能的复合物。

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