Arc-Evaporated Nanoscale Multilayer Nitride-Based Coatings for Protection Against Wear, Corrosion, and Oxidation

摘要

The studies of the structure and properties of nanoscale multilayer coatings based on the nitrides of refractory metals are summarized in a brief review. By the example of TiN/MoN, TiN/ZrN, CrN/MoN, and more complex (multilayer) (TiZrNbTaHf)N/WN:(TiZrNbTaHf)N/MoN obtained by vacuum-arc deposi-tion of cathode, the dependences of their hardness, wear resistance, friction, corrosion, and oxidation on conditions of the deposition and layers’ thickness are investigated and analysed. The regularities of the structure and behaviour properties of such nanoscale multilayer coatings depending on the size of nanograins, textures, and stresses arising in these coatings are described.