The pure-shear mode solidly mounted resonator based on c-axis oriented ZnO film

摘要

In this paper, we fabricate a pure-shear mode film bulk acoustic resonator based on c-axis oriented ZnO film. The resonator is consisted of an in-plane electrode, a highly c-axis oriented ZnO film and a SiO_2/W Bragg reflector. The shear mode wave is excited by the lateral electric field. The resonator works in a pure-shear mode with the resonance frequency near 1.5 GHz and the Q-factor of 479 in air. There is no obvious longitudinal mode resonance in the frequency response, which can be explained that the electric field component normal to the surface is very weak and the Bragg reflector has the effective frequency selectivity for the shear mode. Importantly for sensors, the immersion into de-ionized water and glycerol liquid still allows for a Q-factor up to 335 and 220, respectively. This resonator shows the potential as mass loading sensors for biochemical application.