溶胶-凝胶法在聚酰亚胺衬底上制备c轴取向ZnO薄膜

摘要

通过溶胶-凝胶工艺,采用两步加热法在聚酰亚胺表面制备了具有c轴取向的ZnO薄膜.通过差式扫描量热-热重分析(DSC-TGA)得出最佳的前热处理温度和后热处理温度分别为300和390℃.通过X射线衍射(XRD)和扫描电子显微镜(SEM)对薄膜的晶体取向和表面形貌进行了分析,描述了ZnO薄膜在聚酰亚胺上的生长过程.拉伸实验结果表明,ZnO薄膜与聚酰亚胺衬底有较强的附着力.%c-Axis oriented ZnO thin films were prepared by sol-gel method using two-steps heating method on polyimide ( PI) substrate. Differential scanning calorimetry-thermogravimetric analysis ( DSC-TGA) results show that optimal ZnO thin film could be obtained after the sol was preheated at 300℃ and postheated at 390 ℃. c-Axis orientation and morphologies of the thin films were characterized by X-ray diffraction ( XRD) and scanning electron microscopy(SEM). The stages of ZnO growth on the PI substrate were described in detail. Moreover, the result of the tensile test suggests that the ZnO films have good adhesion to the polyimide substrate.