机译:薄SiGe外延层的热可靠性
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, ROC;
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan, ROC;
Department of Mechanical Engineering, Chin-Yi University of Technology, Taichung 411, Taiwan, ROC;
Department of Automation Engineering, Nan Kai University of Technology, Nantou 54243, Taiwan, ROC;
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, 30013, Taiwan, ROC;
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 300, Taiwan, ROC;
SiGe; ultrahigh-vacuum chemical vapor; deposition; AFM; nanoscratch;
机译:通过超高真空化学气相沉积在Si(100)上生长高质量Ge外延层的超薄低温SiGe缓冲液
机译:掺碳的薄SiGe外延层中的应变松弛
机译:UHV / CVD掺杂和生长薄Si外延层和SiGe
机译:通过热驱动的松弛非常薄的SiGe缓冲层生长
机译:在机械和热负荷下用于太阳能电池的薄膜可靠性建模。
机译:晶圆级底部填充对热循环测试过程中超薄芯片堆叠式3D-IC组件微凸点可靠性的影响
机译:SiGe癫痫菌株弛豫初始阶段的互核空间分析
机译:siGe外延层应变松弛初始阶段的倒易空间分析