The electrical and morphological properties of magnesium oxide/alumina bilayered thin films prepared by electron beam evaporation at oblique incidence

摘要

The electrical and morphological properties of magnesium oxide (MgO)/alumina (Al_2O_3) bilayered thin films prepared by electron beam evaporation at oblique incidence are reported. The MgO thin films are deposited when the incline angle is 55° on various Al_2O_3 thin films incline angles. A columnar grain with a roofing-tile-shaped surface is observed in these MgO/Al_2O_3 thin films. X-ray pole figures and θ-2θ scan, ω-scan are used to characterize in-plane and out-of-plane textures. The relationships between ω-FWHM, capacitor, leakage current, and the inclined angles are studied. The morphology is investigated by using scanning electron microscope (SEM). So the oblique angle deposition method is an effective way to control the microstructure of thin films.