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Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting

机译:集成了力传感器的亚纳米工具-工件接触的分子动力学模拟,用于超精密微切削的快速工具伺服系统

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This paper investigates the contact characteristics between a copper workpiece and a diamond tool in a force sensor-integrated fast tool servo (FS-FTS) for single point diamond microcutting and in-process measurement of ultra-precision surface forms of the workpiece. Molecular dynamics (MD) simulations are carried out to identify the subnanometric elastic-plastic transition contact depth, at which the plastic deformation in the workpiece is initiated. This critical depth can be used to optimize the FS-FTS as well as the cutting/measurement process. It is clarified that the vibrations of the copper atoms in the MD model have a great influence on the subnanometric MD simulation results. A multi-relaxation time method is then proposed to reduce the influence of the atom vibrations based on the fact that the dominant vibration component has a certain period determined by the size of the MD model. It is also identified that for a subnanometric contact depth, the position of the tool tip for the contact force to be zero during the retracting operation of the tool does not correspond to the final depth of the permanent contact impression on the workpiece surface. The accuracy for identification of the transition contact depth is then improved by observing the residual defects on the workpiece surface after the tool retracting. (C) 2016 Elsevier B.V. All rights reserved.
机译:本文研究了在力传感器集成的快速工具伺服系统(FS-FTS)中用于单点金刚石微切割和工件超精密表面形状的在线测量的铜工件与金刚石工具之间的接触特性。进行分子动力学(MD)模拟以识别亚纳米级的弹塑性过渡接触深度,在该深度处会引发工件中的塑性变形。该临界深度可用于优化FS-FTS以及切割/测量过程。可以看出,MD模型中铜原子的振动对亚纳米MD模拟结果有很大的影响。然后,基于主振动分量具有由MD模型的大小确定的一定周期的事实,提出了一种多松弛时间方法来减少原子振动的影响。还确定的是,对于亚纳米级的接触深度,在工具的缩回操作期间用于使接触力为零的工具尖端的位置不对应于工件表面上的永久接触压痕的最终深度。通过观察刀具退刀后工件表面的残留缺陷,可以提高识别过渡接触深度的精度。 (C)2016 Elsevier B.V.保留所有权利。

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