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Fabrication of optically-functionalized colorless polyimide patterns with high durability

机译:具有高耐久性的光学功能化的无色聚酰亚胺图案的制造

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Colorless polyimide (CPI) is a promising material for flexible substrates because of its excellent mechanical hardness, chemical durability, thermal stability, and high optical transmittance. In particular, its superior durability under heating and mechanical forces compared with other polymeric materials makes polyimide compatible for industrial applications. Thus, it has been actively investigated for use in preparing flexible and transparent substrates for optical devices. Nevertheless, there is little research on the direct pattering of CPI to form structures with various optical functions. In this research, a simple and cost-effective process involving the patterning of optically functional structures and imidization via thermal nanoimprint lithography (NIL) was developed. CPI films patterned with structures such as nanoscale and microscale cones were fabricated by thermal NIL, and their optical functions, including their antireflection and high scattering properties, were demonstrated by UV-vis analysis. Moreover, the patterned CPI film has an excellent thermal stability and a mechanical hardness up to 1.12 GPa; this value was nearly maintained even at 400 degrees C. Therefore, nano-to microscale optical patterns of CPI were successfully formed, and these structures are stable towards mechanical damage and high temperatures. (C) 2017 Elsevier B.V. All rights reserved.
机译:无色聚酰亚胺(CPI)具有出色的机械硬度,化学耐久性,热稳定性和高透光率,因此是用于柔性基板的有前途的材料。特别是,与其他聚合物材料相比,其在加热和机械力下的优越耐久性使聚酰亚胺可兼容工业应用。因此,已经积极地研究了其用于制备光学器件的柔性和透明基板。然而,很少有关于直接图案化CPI以形成具有各种光学功能的结构的研究。在这项研究中,开发了一种简单且具有成本效益的工艺,包括光学功能结构的图案化和通过热纳米压印光刻(NIL)的酰亚胺化。通过热NIL制备了具有纳米和微锥等结构图案的CPI膜,并通过UV-vis分析证明了它们的光学功能,包括其抗反射性和高散射特性。而且,图案化的CPI膜具有出色的热稳定性和高达1.12 GPa的机械硬度。该值甚至在400摄氏度时也几乎保持不变。因此,成功形成了CPI的纳米级至微米级光学图案,并且这些结构对机械损伤和高温稳定。 (C)2017 Elsevier B.V.保留所有权利。

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