首页> 外文期刊>IEEE Transactions on Applied Superconductivity >Superconducting Tl/sub 2/Ba/sub 2/CaCu/sub 2/O/sub 8/ thin films prepared by post-annealing in a flow-through multiple-zone furnace
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Superconducting Tl/sub 2/Ba/sub 2/CaCu/sub 2/O/sub 8/ thin films prepared by post-annealing in a flow-through multiple-zone furnace

机译:超导Tl / sub 2 / Ba / sub 2 / CaCu / sub 2 / O / sub 8 /通过在流通式多区炉中进行后退火制备的薄膜

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摘要

Tl/sub 2/Ba/sub 2/CaCu/sub 2/O/sub 8/ thin films mere prepared first time by use of a multiple-zone flow-through thallination process. Thallous oxide was volatilized from condensed thallium oxide in a low temperature source zone and convectively transported to a higher temperature thallination zone in which initially amorphous Ba/sub 2/CaCu/sub 2/O/sub 5/ precursor films were located. By careful control of the source temperature, film temperature, flow rate, anneal time, and rates of heat up and cool down, smooth Tl/sub 2/Ba/sub 2/CaCuO/sub 8/ thin films ware prepared on [100] LaAlO/sub 3/ with the following properties: inductive T/sub c/ of 107.6 K and 80% transition width of 1.3 K, transport J/sub c/ at 75 K of 1.3/spl times/10/sup 5/ A/cm/sup 2/, and R/sub s/ at 10 GHz and 80 K of 1.3 m/spl Omega/. The scalability of the process to large area film processing was demonstrated by the preparation of Tl/sub 2/Ba/sub 2/CaCu/sub 2/O/sub 8/ thin films on LaAlO/sub 3/ three-inch diameter wafers.
机译:Tl / sub 2 / Ba / sub 2 / CaCu / sub 2 / O / sub 8 /薄膜仅是通过使用多区流通式脱盐法首次制备的。在低温源区中,氧化的氧化from从冷凝的氧化lium中挥发出来,并将对流地输送到高温的卤化区,该区最初是非晶态的Ba / sub 2 / CaCu / sub 2 / O / sub 5 /前体薄膜。通过仔细控制源温度,膜温度,流速,退火时间以及加热和冷却的速率,可以使在[100]上制备的Tl / sub 2 / Ba / sub 2 / CaCuO / sub 8 /薄膜制品光滑。 LaAlO / sub 3 /具有以下特性:感应T / sub c /为107.6 K,80%的跃迁宽度为1.3 K,在75 K下以1.3 / spl次/ 10 / sup 5 / A /的速度传输J / sub c / cm / sup 2 /和R / sub s /在10 GHz和80 K为1.3 m / spl Omega /下。通过在LaAlOO / sub 3 /三英寸直径晶片上制备Tl / sub 2 / Ba / sub 2 / CaCu / sub 2 / O / sub 8 /薄膜,证明了该工艺对大面积薄膜加工的可扩展性。

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