Self-ordered nanopore arrays through hard anodization assisted by anode temperature ramp

摘要

In the present work, hard anodization assisted by anode temperature ramp was employed to fabricate self-ordered nanoporous alumina in the wide range of interpore distances (259-405 nm) in pure oxalic acid and mixture of oxalic and phosphoric acid solutions. Anode temperature ramp technique was employed to adjust the anodization current density to optimize the self-ordering of the nanopore arrays in the interpore range in which no ordered self-assembled hard anodized anodic aluminum oxide has reported. It is found that the certain ratios of oxalic and phosphoric acid solutions in this anodization technique increased self-ordering of the nanopores especially for anodization voltages over the 170 V by increasing alumina's viscous flow which could lead to decrease the overall current density of anodization, yet leveled up by anode temperature ramp. However, below 150 V anodization voltage, the ratio of interpore distance to the anodization voltage of the both anodization techniques was the same (～ 2 nm/V), while above this voltage, it increased to about 2.2 nm/V.