Nanoscale specific heat capacity measurements using optoelectronic bilayer microcantilevers

摘要

We describe a technique for optically and electrically detecting and heating bilayer microcantilevers (BMCs) to high temperatures at fast heating rates for nanoscale specific heat capacity measurements. The platinum and silicon nitride (Pt-SiN_x) BMCs act simultaneously as a heater, temperature sensor, and mass sensor (24 pg resolution). The calibration of the system was validated for a mass of 12.6 ng by melting point and specific heat capacity measurements of deposited aluminum nanoparticles.