聚合物双层微悬臂梁的温度敏感特性研究

摘要

利用微塑模技术和镀膜技术制作了一种双层聚合物悬臂梁,基于聚合物和金2种材料膨胀系数的差异,不同温度下梁的挠度不同,其形变可通过光杠杆放大由位置敏感探测器(PSD)进行检测.理论计算和实验结果表明:在聚合物悬臂梁处于玻璃态下,输出电压与温度呈线性关系.%A novel bi-layer polymer cantilever is designed and fabricated by micromold and coating technologies,and deflection of the beam varies with temperature based on the different coefficient of the thermal expansion between polymer and Au,and deformation is measured by position sensitive detectors(PSD) after it is enlarged by optical lever.Theoretic computation and experimental results show that when polymer is under glass state,the output voltage is nearly linear with temperature.