Silicon nanowire based Pirani sensor for vacuum measurements

摘要

Nano-Pirani vacuum gauges based on the physical properties of suspended silicon nanowires have been fabricated and characterized. With a 160 × 260 nm2 rectangular section and a 5.2 μm length, they are 50 times smaller than the smallest silicon based vacuum sensor and they exhibits much lower power consumption. The nano-Pirani constructed are capable of measuring pressures from 50 to 105 Pa. Moreover, their fabrication is compatible with microelectronic and micromachining fabrication techniques making them suitable for in-situ monitoring of micro and nano systems vacuum packaging.