Pirani - pressure measurement arrangement and combined sensor with such a pirani - pressure measurement arrangement

摘要

Pirani - pressure measurement arrangement with the following features:a first heating device (10; 10 '') for a pirani - measurement;a second heating device (20; 20 '') for a pirani - measurement, wherein the second heating device (30) is arranged as a reserve - heating device for the first heating device (10; 10'') when the first heating device (10; 10 '') is defective;a holding device (11, 12, 21, 22, 50) for holding the first and the second heating device (10; 10 '', 20; 20''), in such a way that the first and the second heating device are electrically insulated from one another;a carrier (40) for supporting the holding device (11, 12, 21, 22, 50), in such a way that the first and second heating device (10; 10 '', 20; 20'') are exposed to a common pressure; anda control device, which is arranged, the first heating device (10; 10 '') to be supplied with current, and the second heating device (20; 20'') is not to be supplied with current, when the first heating device is not defective, and the is further arranged,..