Arrangement for a pirani - pressure measurement probe

摘要

The invention relates to an arrangement for a pirani - pressure measurement probe with a pressure influence of medium u.sub.0 on medium u.sub.7, which is of a pirani - element with a at the pirani - element existing pressure-dependent control variable. This consists of a closed control loop of the pirani - element, a of a digital control element controlled by voltage source for generating a control voltage for the pirani - element and a measuring unit for determining of the pirani - element on the adjusting value of the controlled variable in feedback to the digital control element. In one embodiment, the controlled variable of the resistance of the pirani - element. As a result, the is - temperature of the pirani - element, the indirect controlled variable.