Air damping of atomically thin MoS2 nanomechanical resonators

摘要

We report on experimental measurement of air damping effects in high frequency nanomembrane resonators made of atomically thin molybdenum disulfide (MoS2) drumhead structures. Circular MoS2 nanomembranes with thickness of monolayer, few-layer, and multi-layer up to ∼70 nm (∼100 layers) exhibit intriguing pressure dependence of resonance characteristics. In completely covered drumheads, where there is no immediate equilibrium between the drum cavity and environment, resonance frequencies and quality (Q) factors strongly depend on environmental pressure due to bulging of the nanomembranes. In incompletely covered drumheads, strong frequency shifts due to compressing-cavity stiffening occur above ∼200 Torr. The pressure-dependent Q factors are limited by free molecule flow (FMF) damping, and all the mono-, bi-, and tri-layer devices exhibit lower FMF damping than thicker, conventional devices do.