Atomically-thin MoS2 resonators for pressure sensing

摘要

We describe the first experimental investigation of pressure-dependent resonant motions in high-frequency circular drumhead resonators based on atomically-thin molybdenum disulfide (MoS2), which demonstrate attractive performance and potential for pressure sensing. Circular bilayer and trilayer MoS2 membrane resonators with diameter of ∼1.8μm are studied in the pressure range of ∼10mTorr to ∼400Torr. We observe frequency shifts due to membrane bulging, tensioning, and squeeze-film effects with varying pressure. We find very high pressure responsivity of resonance frequency of ∼0.77MHz/Torr, ∼0.043MHz/Torr, and ∼0.21MHz/Torr, in different pressure regimes. These results show that MoS2 membrane resonators are exceptional for pressure sensing in a wide pressure range.