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Structural transformation and field emission enhancement of carbon nanofibers by energetic argon plasma post-treatment

机译:高能氩等离子体后处理对碳纳米纤维的结构转化和场发射增强

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摘要

Vertically aligned carbon nanofibers (CNFs) grown by plasma enhanced chemical vapor deposition (PECVD) were transformed into cone-shaped nanostructures after treatment by argon (Ar) plasma. Significant enhancement of field emission characteristics of the post-treated CNFs has been achieved. Analysis by electron microscopy and energy dispersive spectroscopy (EDS) suggests that the structural transformation is a result of a cosputtering/deposition process by energetic plasma ions. The enhancements can be attributed to the combining effects of an additional Si/C layer coverage, catalytic nanoparticles removal and the sharpening of CNFs tips. The argon plasma post-treatment processes developed here can be easily extended to in situ PECVD processes for fabricating CNFs based emitters.
机译:通过等离子增强化学气相沉积(PECVD)生长的垂直排列的碳纳米纤维(CNF)在经过氩(Ar)等离子体处理后转变为锥形纳米结构。已经实现了后处理CNF的场发射特性的显着增强。通过电子显微镜和能量色散光谱(EDS)进行的分析表明,结构转变是高能等离子体离子共同溅射/沉积过程的结果。增强可以归因于额外的Si / C层覆盖,催化纳米颗粒去除和CNF尖端锐化的综合效果。此处开发的氩气等离子体后处理工艺可以轻松扩展到用于制造基于CNF的发射极的原位PECVD工艺。

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