Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity

摘要

It has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89°phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (～7 ppm) to leakage of H_(2) gas.