VACUUM LEAK DETECTOR FOR LEAK DETECTION USING LIGHT TEST GASES

摘要

A vacuum leak detector for detecting leaks by means of light gases as test gases, such as helium, has a sample connected in a gas-tight manner to a vacuum pump and to a gas detector, and is associated with test gas spraying means. In order to significantly increase its sensitivity, a high vacuum pump (7) whose test gas compression capacity is lower than that for heavy gases such as N2 or H2O is mounted in the connecting pipe (4) between gas detector (5) and sample (1). The fore-vacuum side (8) of the pump (7) faces the sample (1) and its high vacuum side (9) faces the detector (5).