High critical current-density (10 to 420 kA/cm~2) superconductor-insulator-superconductor tunnel junctions with aluminum nitride barriers have been realized using a remote nitrogen plasma from an inductively coupled plasma source operated in a pressure range of 10~(-3)-10~(-1) mbar. We find a much better reproducibility and control compared to previous work. From the current-voltage characteristics and cross-sectional transmission electron microscopy images it is inferred that, compared to the commonly used AlO_x barriers, the polycrystalline A1N barriers are much more uniform in transmissivity, leading to a better quality at high critical current densities.
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机译:使用来自感应耦合等离子体源的远程氮等离子体,在10〜(-)的压力范围内操作,已经实现了具有氮化铝势垒的高临界电流密度(10至420 kA / cm〜2)超导体-绝缘体-超导体隧道结。 3)-10〜(-1)毫巴。与以前的工作相比,我们发现了更好的可重复性和可控性。从电流-电压特性和横截面透射电子显微镜图像可以推断,与常用的AlO_x势垒相比,多晶AlN势垒的透射率更加均匀,从而在高临界电流密度下具有更高的质量。
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