Integration of In_2O_3 nanoparticle based ozone sensors with GalnN/GaN light emitting diodes

摘要

There is a high demand for compact low-cost ozone sensors. It has been shown recently that In_2O_3 nanolayers can act as ozone sensitive films activated at room temperature by ultraviolet light. In the present work, the authors integrate ultrathin layers of In_2O_3 nanoparticles and a GaInN/GaN based blue light emitting diode (LED) on a single sensor chip. The integrated sensor was found to be sensitive to O_3 concentrations as low as ～40 ppb. These results demonstrate that by integrating GaInN/GaN based blue LEDs and metal oxide sensing layers back to back on a single chip, compact and robust gas sensors can be realized.