Use of real-time Fourier transform infrared reflectivity as an in situ monitor of YBa_2Cu_3O_7 film deposition and processing

摘要

Fourier transform infrared reflectivity (FTIR) has been utilized as an in situ, real-time diagnostic during high-rate, e-beam deposition of YBa_2Cu_3O_7 (YBCO). The results demonstrate the great utility of FTIR as an in situ monitor of YBCO deposition and postdeposition processing. They also point to a completely different picture of the nature and associated kinetic and thermodynamic pathways of the high-rate, e-beam process, both during deposition and as a function of subsequent trajectories through temperature and oxygen pressure space.