Absolute density and temperature of O(~1D_2) in highly Ar or Kr diluted O_2 plasma

摘要

The absolute density and translational temperature of excited O atoms [O(~1D_2)] in O_2 surface-wave-excited plasmas (SWPs) with high Kr or Ar dilution were measured by using vacuum ultraviolet laser absorption spectroscopy. It was observed that the absolute density of O(~1D_2) in Kr/O_2 SWP was lower than that in Ar/O_2 SWP above a pressure of 90 Pa, and the O(~1D_2) had an elevated temperature of around 2000 K in the SWPs. Furthermore, the O(~1D_2) flux was identified as a key parameter in the oxidation process. These results are very important knowledge relevant to plasma oxidation.