The microstructural changes associated with the formation of lithium tantalate waveguides after high repetition rate ultrafast laser inscription has been investigated by confocal micro-Raman experiments. While the laser beam focal volume is characterized by significant lattice damage, no reduction of Raman mode strength has been observed at the guiding region, suggesting the preservation of the nonlinear optical coefficient in the waveguide. A general blueshift of the Raman modes has been observed at the guiding region, suggesting lattice compression as the dominant mechanism of waveguide formation.
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