Non-resonant parametric amplification in biomimetic hair flow sensors: Selective gain and tunable filtering

摘要

We demonstrate that the responsivity of flow sensors for harmonic flows can be improved significantly by non-resonant parametric amplification. Using electrostatic spring softening by AC-bias voltages, increased responsivity and sharp filtering are achieved in our biomimetic flow sensors. Tunable filtering is obtained for non-resonant electromechanical parametric amplification, applicable at a wide range of non-resonant frequencies while achieving highly selective gain of up to 20 dB.